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Synthesis of Hydrogenated Silicon Oxycarbonitride from a Gas Mixture of Methyltris(Diethylamino)Silane, Nitrogen, and Oxygen by Fainer, N. I.; Plekhanov, A. G.; Maksimovsky, E. A.; Rumyantsev, Yu. M. is a Materials Science article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Materials Science.

Author
Fainer, N. I.; Plekhanov, A. G.; Maksimovsky, E. A.; Rumyantsev, Yu. M.
Publisher
SP MAIK Nauka/Interperiodica; Pleiades Publishing; Springer Science and Business Media LLC; Pleiades Publishing Ltd (ISSN 1087-6596)
Published
2018
Field
Materials Science (Physical Sciences)