About this scholarly article

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Wafer-to-wafer transportable gold particle plug for spot vacuum sealing of MEMS by Ogashiwa, Toshinori; Totsu, Kentaro; Nishizawa, Mitsutomo; Ishida, Hiroyuki; Inoue, Kenichi; Sasaki, Yuya; Miyairi, Masayuki; Tanaka, Shuji; Esashi, Masayoshi is a scholarly article available to read on EtoBox.

Author

Ogashiwa, Toshinori; Totsu, Kentaro; Nishizawa, Mitsutomo; Ishida, Hiroyuki; Inoue, Kenichi; Sasaki, Yuya; Miyairi, Masayuki; Tanaka, Shuji; Esashi, Masayoshi

Publisher

IEEE

Published

2017

Language

EN