About this scholarly article

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) - Development of SiCN ceramic thermal actuators by Liew, L.-A.; Bright, V.M.; Dunn, M.L.; Daily, J.W.; Raj, R. is a scholarly article available to read on EtoBox.

Author

Liew, L.-A.; Bright, V.M.; Dunn, M.L.; Daily, J.W.; Raj, R.

Publisher

IEEE

Published

2002