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Comparison of (CH4O2)bH2 and COH2 plasmas for low temperature diamond film deposition by electron cyclotron resonance plasma-assisted chemical vapor deposition by Eddy, C.R.; Youchison, D.L.; Sartwell, B.D. is a Materials Science article available to read on EtoBox.

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Author
Eddy, C.R.; Youchison, D.L.; Sartwell, B.D.
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0925-9635)
Published
1994
Field
Materials Science (Physical Sciences)

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