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About this Materials Science article
Minimizing the Effects of Galvanic Corrosion During Chemical Mechanical Planarization of Aluminum in Moderately Acidic Slurry Solutions by X. Shi; S.E. Rock; M.C. Turk; D. Roy is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- X. Shi; S.E. Rock; M.C. Turk; D. Roy
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0254-0584)
- Published
- 2012
- Field
- Materials Science (Physical Sciences)