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About this Engineering article
CH4/H2 reactive ion etching for gate recessing of pseudomorphic modulation doped field effect transistors by Pereira, R. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Pereira, R.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 1991
- Field
- Engineering (Physical Sciences)