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About this Engineering article
VO n Complexes in RTA Treated Czochralski Silicon Wafers Investigated by FTIR Spectroscopy by Kot, D.; Kissinger, G.; Dabrowski, J.; Sattler, A. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kot, D.; Kissinger, G.; Dabrowski, J.; Sattler, A.
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 2162-8769)
- Published
- 2018
- Language
- EN
- Field
- Engineering (Physical Sciences)
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