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2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - A Methodology for Improving Granularity of Wafer Strength Testing to Characterize and Qualify a 150 micron DFM Wafer Thinning Process by Dries, Brian; Kingsbury, Jeff; Mohamed, Elias is a scholarly article available to read on EtoBox.

Author
Dries, Brian; Kingsbury, Jeff; Mohamed, Elias
Publisher
IEEE
Published
2008

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