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About this Engineering article
Arrays of Holes Fabricated by Electron-beam Lithography Combined with Image Reversal Process Using Nickel Pulse Reversal Plating by Awad, Yousef; Lavallée, Eric; Lau, Kien Mun; Beauvais, Jacques; Drouin, Dominique; Cloutier, Melanie; Turcotte, David; Yang, Pan; Kelkar, Prasad is a Engineering article available to read on EtoBox.
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- Author
- Awad, Yousef; Lavallée, Eric; Lau, Kien Mun; Beauvais, Jacques; Drouin, Dominique; Cloutier, Melanie; Turcotte, David; Yang, Pan; Kelkar, Prasad
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)