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About this Engineering article
Theoretical investigation of nitrogen-doping effect on vacancy aggregation processes in Si by Kageshima, Hiroyuki; Taguchi, Akihito; Wada, Kazumi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kageshima, Hiroyuki; Taguchi, Akihito; Wada, Kazumi
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2000
- Language
- EN
- Field
- Engineering (Physical Sciences)
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