About this scholarly article

SPIE Proceedings [SPIE Smart Structures & Materials '95 - San Diego, CA (Sunday 26 February 1995)] Smart Structures and Materials 1995: Smart Electronics - Smart MEMS: flip chip integration of MEMS and electronics by Markus, Karen W.; Dhuler, Vijayakumar R.; Roberson, D.; Cowen, Allen; Berry, M.; Nangalia, S.; Varadan, Vijay K. is a scholarly article available to read on EtoBox.

Author

Markus, Karen W.; Dhuler, Vijayakumar R.; Roberson, D.; Cowen, Allen; Berry, M.; Nangalia, S.; Varadan, Vijay K.

Publisher

SPIE

Published

1995

Language

EN