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Modeling Copper Diffusion in Silicon Oxide, Nitride, and Carbide by Zubkov, Vladimir (author);Han, Joseph (author);Sun, Grace (author);Musgrave, Charles (author);Aronowitz, Sheldon (author) is a Engineering article available to read on EtoBox.

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Author
Zubkov, Vladimir (author);Han, Joseph (author);Sun, Grace (author);Musgrave, Charles (author);Aronowitz, Sheldon (author)
Publisher
Materials Research Society
Published
2002
Field
Engineering (Physical Sciences)

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