Opening book details…
About this Engineering article
Influence of surface preparation on atomic layer deposition of Pt films by Ge, Liang; Hu, Cheng; Zhu, Zhiwei; Zhang, Wei; Wu, Dongping; Zhang, Shili is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ge, Liang; Hu, Cheng; Zhu, Zhiwei; Zhang, Wei; Wu, Dongping; Zhang, Shili
- Publisher
- IOP Publishing; Institute of Physics Publishing (ISSN 1674-4926)
- Published
- 2012
- Language
- EN
- Field
- Engineering (Physical Sciences)