Opening book details…
About this Engineering article
Crystallographic defects in thermally oxidized wafer bonded silicon on insulator (SOI) substrates by Luis Felipe Giles; Yasuo Kunii is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Luis Felipe Giles; Yasuo Kunii
- Publisher
- Springer US; Springer-Verlag; Springer New York LLC; Springer Science and Business Media LLC (ISSN 0361-5235)
- Published
- 1999
- Field
- Engineering (Physical Sciences)