About this scholarly article

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) - The implementation of AFM for process monitoring and metrology in trench MOSFET device manufacturing by Ridley, R.S.; Strate, C.; Cumbo, J.; Grebs, T.; Gasser, C. is a scholarly article available to read on EtoBox.

Author

Ridley, R.S.; Strate, C.; Cumbo, J.; Grebs, T.; Gasser, C.

Publisher

IEEE

Published

2002