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Effects of Ion Beam Application on the Deposition of Low-resistivity Titanium Nitride Films Onto Silicon by Yokota, Katsuhiro; Nakamura, Kazuhiro; Kasuya, Tomohiko; Mukai, Katsuhisa; Ohnishi, Masami is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Yokota, Katsuhiro; Nakamura, Kazuhiro; Kasuya, Tomohiko; Mukai, Katsuhisa; Ohnishi, Masami
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2003
- Language
- EN
- Field
- Engineering (Physical Sciences)