About this scholarly article

SPIE Proceedings [SPIE 1988 Intl Congress on Optical Science and Engineering - Hamburg, Germany (Monday 19 September 1988)] In-Process Optical Measurements - In-Situ Optical Monitoring Of Thin Film Deposition by Netterfield, R. P.; Martin, P. J.; Muller, K. H.; Spring, Kenneth H. is a scholarly article available to read on EtoBox.

Author

Netterfield, R. P.; Martin, P. J.; Muller, K. H.; Spring, Kenneth H.

Publisher

SPIE

Published

1989

Language

EN