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About this Engineering article
X-Ray Residual Stress Analysis of Aluminum Nitride Film with c-Axis Orientation on Glass Substrate. by HANABUSA, Takao; TOMINAGA, Kikuo; FUJIWARA, Haruo is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- HANABUSA, Takao; TOMINAGA, Kikuo; FUJIWARA, Haruo
- Publisher
- Japan Science and Technology Information Aggregator, Electronic; The Society of Materials Science Japan; Society of Materials Science Japan; Society of Materials Science, Japan (ISSN 0514-5163)
- Published
- 1993
- Field
- Engineering (Physical Sciences)
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