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Analysis of Scratches Formed on Oxide Surface during Chemical Mechanical Planarization by Choi, Jae-Gon; Prasad, Y. Nagendra; Kim, In-Kwon; Kim, In-Gon; Kim, Woo-Jin; Busnaina, Ahmed A.; Park, Jin-Goo is a Engineering article available to read on EtoBox.
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- Author
- Choi, Jae-Gon; Prasad, Y. Nagendra; Kim, In-Kwon; Kim, In-Gon; Kim, Woo-Jin; Busnaina, Ahmed A.; Park, Jin-Goo
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
- Published
- 2010
- Language
- EN
- Field
- Engineering (Physical Sciences)