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Can I read New Technology for Junction Isolated Power ICs on EtoBox?
New Technology for Junction Isolated Power ICs by Judy L. Sutor is a Materials Science article available to read on EtoBox.
What is New Technology for Junction Isolated Power ICs about?
This paper describes a new method for forming junction isolated integrated circuit structures with a vertical output device. The technique uses etch and epitaxy to form the isolation structure. This paper compares the present technique with the new technique. Epitaxial growth conditions to optimize the pattern integrity are considered. The effect of the grind and polish step on the design rules is also considered. Finally, device data is presented using this technology to optimize the structure for both a high voltage and low voltage application.
Who reads New Technology for Junction Isolated Power ICs?
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Judy L. Sutor
- Publisher
- The Electrochemical Society (ISSN 0161-6374)
- Published
- 1987
- Language
- EN
- Field
- Materials Science (Physical Sciences)