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What is Epitaxy about?

The document outlines the VLSI Process Technology course focused on epitaxy, detailing types such as homo and hetero epitaxy, and their applications in semiconductor technology. It discusses various epitaxy systems including Liquid Phase Epitaxy (LPE), Vapour Phase Epitaxy (VPE), and Molecular Beam Epitaxy (MBE), along with their mechanisms, advantages, and disadvantages. Additionally, it covers critical processes like in-situ cleaning, doping methods, and the importance of parameter optimization in achievi

Author

prasitmazumder2024

Language

EN