Opening book details…
About this scholarly article
Proceedings of IEEE Sensors - Microsystems based on surface micromachined mechanisms by Oliver, A.D.; Peter, F.J.; Polosky, M.A. is a scholarly article available to read on EtoBox.
- Author
- Oliver, A.D.; Peter, F.J.; Polosky, M.A.
- Publisher
- IEEE
- Published
- 2002
- Language
- EN
More by Oliver, A.D.; Peter, F.J.; Polosky, M.A.
Browse all works by Oliver, A.D.; Peter, F.J.; Polosky, M.A.