About this scholarly article

VB-3 passivation effects in polysilicon by hydrogen implantation by Greve, D.W.; Chen, D.L.; Guzman, A.M. is a scholarly article available to read on EtoBox.

Author

Greve, D.W.; Chen, D.L.; Guzman, A.M.

Publisher

IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0018-9383)

Published

1984

Language

EN