About this scholarly article

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Fine frequency tuning in resonant sensors by Cabuz, C.; Fukatsu, K.; Hashimoto, H.; Shoji, S.; Kurabayashi, T.; Minami, K.; Esashi, M. is a scholarly article available to read on EtoBox.

Author

Cabuz, C.; Fukatsu, K.; Hashimoto, H.; Shoji, S.; Kurabayashi, T.; Minami, K.; Esashi, M.

Publisher

IEEE

Published

1994

Language

EN