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What is Lithography Process in IC Fabrication about?
Lithography is a crucial process in semiconductor manufacturing that transfers patterns from a mask to a resist-coated wafer, with performance determined by resolution, registration, and throughput. Various lithographic techniques, including optical, electron, x-ray, and ion lithography, offer different resolutions and efficiencies, with optical lithography being the most common despite its limitations for sub-0.1 µm designs. The document also discusses the materials and processes involved in lithography, i
- Author
- Eddy Tanga
- Language
- EN