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This study investigates the effects of substrate temperature on the crystal structure, surface topography, and morphology of cerium dioxide (CeO2) thin films deposited via RF magnetron sputtering. The results indicate that the films exhibit a cubic fluorite structure with varying preferred orientations based on the substrate temperature, and the surface roughness and average grain size fluctuate accordingly. Overall, the findings suggest that controlling substrate temperature allows for the engineering of C

Author

Abdellatif EL HABIB

Language

EN