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Interfacial Hardness Enhancement in Deuterium Annealed 0.25 μM Channel Metal Oxide Semiconductor Transistors by Devine, R. A. B.; Autran, J.-L.; Warren, W. L.; Vanheusdan, K. L.; Rostaing, J.-C. is a Engineering article available to read on EtoBox.

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Author
Devine, R. A. B.; Autran, J.-L.; Warren, W. L.; Vanheusdan, K. L.; Rostaing, J.-C.
Publisher
American Institute of Physics; AIP Publishing (ISSN 0003-6951)
Published
1997
Language
EN
Field
Engineering (Physical Sciences)

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