About this scholarly article

1998 IEEE International Reliability Physics Symposium Proceedings 36th Annual (Cat No 98CH36173) RELPHY-98 - A comparative study of leakage mechanism of Co and Ni salicide processes by Goto, K.-I.; Watanabe, J.; Sukegawa, T.; Fushida, A.; Sakuma, T.; Sugii, T. is a scholarly article available to read on EtoBox.

Author

Goto, K.-I.; Watanabe, J.; Sukegawa, T.; Fushida, A.; Sakuma, T.; Sugii, T.

Publisher

IEEE

Published

1998

Language

EN