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What is Introduction to MEMS and Nanotechnology about?

This document provides an introduction to microelectromechanical systems (MEMS) and nanomanufacturing. It defines MEMS as devices that range in size from below 1 micrometer to above 1 millimeter. MEMS devices are manufactured using microfabrication techniques and can include micro-mechanics, electronics, fluidics and optics integrated into a single device. Examples provided include micromotors and micro cilia arrays. The document outlines the history of MEMS development from the 1950s to the present and dis

Author

Ali Bagheri BehBoud

Language

EN