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About this Engineering article
Clearance of 4H-SiC Sub-Trench in Hot Chlorine Treatment by Koketsu, Hidenori; Hatayama, Tomoaki; Yano, Hiroshi; Fuyuki, Takashi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Koketsu, Hidenori; Hatayama, Tomoaki; Yano, Hiroshi; Fuyuki, Takashi
- Publisher
- Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9752)
- Published
- 2012
- Field
- Engineering (Physical Sciences)
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