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About this Engineering article
Metallization technologies for ULSI by JM Martínez-Duart; JM Albella is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- JM Martínez-Duart; JM Albella
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0042-207X)
- Published
- 1989
- Field
- Engineering (Physical Sciences)