About this Engineering article
A Proposed Calibration Method for Precise Wide Range Scatterometric Measurements by Heng-Kai, Zhao; Zhen-He Fang; Chuan-Liang Yao; Chun-Fu Cai; Jun Zhang is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Heng-Kai, Zhao; Zhen-He Fang; Chuan-Liang Yao; Chun-Fu Cai; Jun Zhang
- Publisher
- Chinese Electronic Periodical Services; Springer-Verlag; Shanghai University Press; Springer Science and Business Media LLC (ISSN 1007-6417)
- Published
- 2003
- Field
- Engineering (Physical Sciences)