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About this Engineering article
Effects of vacuum ultraviolet and ultraviolet irradiation on ultrathin hafnium-oxide dielectric layers on (100)Si as measured with electron-spin resonance by Ren, H.; Cheng, S. L.; Nishi, Y.; Shohet, J. L. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ren, H.; Cheng, S. L.; Nishi, Y.; Shohet, J. L.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2010
- Field
- Engineering (Physical Sciences)
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