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About this Engineering article
Conductivity Improvements of Atomic Layer Deposited Ta3N5 by Dekkers, H. F. W.; Lima, L. P. B.; Van Elshocht, S. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Dekkers, H. F. W.; Lima, L. P. B.; Van Elshocht, S.
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 1938-6737)
- Published
- 2013
- Field
- Engineering (Physical Sciences)
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