About this scholarly article

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Advances in Resist Materials and Processing Technology XXIV - Screening of second-generation high-index liquids by Hendrickx, Eric; Lin, Qinghuang; Postnikov, Sergei; Foubert, Philippe; Gronheid, Roel; Kim, ByeongSoo is a scholarly article available to read on EtoBox.

Author

Hendrickx, Eric; Lin, Qinghuang; Postnikov, Sergei; Foubert, Philippe; Gronheid, Roel; Kim, ByeongSoo

Publisher

SPIE

Published

2007