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About this Engineering article
16.P.05 Aerosol-assisted chemical vapor deposition of copper by C. Roger; T.S. Corbitt; T.T. Kodas; M.J. Hampden-Smith is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- C. Roger; T.S. Corbitt; T.T. Kodas; M.J. Hampden-Smith
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0021-8502)
- Published
- 1994
- Field
- Engineering (Physical Sciences)
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