About this scholarly article

SPIE Proceedings [SPIE Advanced Microelectronic Manufacturing - Santa Clara, CA (Sunday 23 February 2003)] Cost and Performance in Integrated Circuit Creation - Electrical validation of resolution enhancement techniques by Taravade, Kunal N.; Callan, Neal P.; Croffie, Ebo H.; Ahmad, Aftab; Wong, Alfred K. K.; Monahan, Kevin M. is a scholarly article available to read on EtoBox.

Author

Taravade, Kunal N.; Callan, Neal P.; Croffie, Ebo H.; Ahmad, Aftab; Wong, Alfred K. K.; Monahan, Kevin M.

Publisher

SPIE

Published

2003