About this scholarly article

SPIE Proceedings [SPIE ALT '97 International Conference on Laser Surface Processing - Limoges, France (Monday 8 September 1997)] ALT'97 International Conference on Laser Surface Processing - Microstructuring and surface modification by excimer laser machining under thin liquid films by Geiger, Manfred; Roth, Stephan; Becker, W.; Pustovoy, Vladimir I. is a scholarly article available to read on EtoBox.

Author

Geiger, Manfred; Roth, Stephan; Becker, W.; Pustovoy, Vladimir I.

Publisher

SPIE

Published

1998

Language

EN