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About this Engineering article
Investigation on the Dressing Shape of Vacuum Chuck in Wafer Rotation Grinding by Gao, Hang; Tian, Y.B.; Jia, Zhen Yuan; Kang, Ren Ke is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Gao, Hang; Tian, Y.B.; Jia, Zhen Yuan; Kang, Ren Ke
- Publisher
- Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9795)
- Published
- 2005
- Language
- EN
- Field
- Engineering (Physical Sciences)
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