About this scholarly article

2008 9th International Conference on Solid-State and Integrated-Circuit Technology - Integrated CMOS-MEMS technology and its applications by Hiroki Morimura, ; Shinichiro Mutoh, ; Hiromu Ishii, ; Katsuyuki Machida, is a scholarly article available to read on EtoBox.

Author

Hiroki Morimura, ; Shinichiro Mutoh, ; Hiromu Ishii, ; Katsuyuki Machida,

Publisher

IEEE

Published

2008