About this Engineering article
Detailed Measurements and Simplified Modeling of Wafer Charging in Different Barrel Reactor Configurations by Namura, Takashi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Namura, Takashi
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 1991
- Language
- EN
- Field
- Engineering (Physical Sciences)