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About this Engineering article
Growth Mechanism of Microcrystalline and Polymorphous Silicon Film with Pure Silane Source Gas by Li, Shi-Bin; Wu, Zhi-Ming; Jiang, Ya-Dong; Yu, Jun-Sheng; Li, Wei; Liao, Nai-Man is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Li, Shi-Bin; Wu, Zhi-Ming; Jiang, Ya-Dong; Yu, Jun-Sheng; Li, Wei; Liao, Nai-Man
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0022-3727)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)
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