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What is Non-Maxwellian EEDF in Argon Plasma about?

This study investigates the non-Maxwellian electron energy distribution function (EEDF) in low-pressure argon plasmas using optical emission spectroscopy (OES) and Langmuir probe measurements. The proposed corona-equilibrium model analyzes the shape factor of the EEDF, revealing a depleted tail in the distribution due to high-energy electron collisions and metastable argon states. The findings indicate that the general shape of the EEDF in these plasmas deviates from the ideal Maxwellian distribution, highl

Author

julianist2007

Language

EN