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About this Engineering article

Low-Frequency Noise Assessment of Work Function Engineering Cap Layers in High-k Gate Stacks by Claeys, C.; Ritzenthaler, R.; Schram, T.; Arimura, H.; Horiguchi, N.; Simoen, E. is a Engineering article available to read on EtoBox.

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Author
Claeys, C.; Ritzenthaler, R.; Schram, T.; Arimura, H.; Horiguchi, N.; Simoen, E.
Publisher
The Electrochemical Society; Electrochemical Society, Inc. (ISSN 2162-8769)
Published
2019
Language
EN
Field
Engineering (Physical Sciences)

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