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About this Engineering article
Effect of substrate temperature and ion bombardment on the formation of cubic boron nitride films: A two-step deposition approach by Ye, J.; Oechsner, H.; Westermeyr, S. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ye, J.; Oechsner, H.; Westermeyr, S.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2001
- Language
- EN
- Field
- Engineering (Physical Sciences)