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About this Engineering article
Effects of Wet Oxidation on the Electrical Properties of Sub-10 Nm Thick Silicon Nitride Films by Eun Gu Lee; Jae Sung Roh; Ho Bin Im is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Eun Gu Lee; Jae Sung Roh; Ho Bin Im
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 1991
- Language
- EN
- Field
- Engineering (Physical Sciences)