About this scholarly article

IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. - CMOS electrothermal microactuators by Parameswaran, M.; Ristic, L.; Chau, K.; Robinson, A.M.; Allegretto, W. is a scholarly article available to read on EtoBox.

Author

Parameswaran, M.; Ristic, L.; Chau, K.; Robinson, A.M.; Allegretto, W.

Publisher

IEEE

Published

1990

Language

EN