About this Engineering article
Novel Laser Annealing Process for Advanced Complementary Metal Oxide Semiconductor Devices with Suppressed Polycrystalline Silicon Gate Depletion and Ultra shallow Junctions by Shima, Akio; Mine, Toshiyuki; Torii, Kazuyoshi is a Engineering article available to read on EtoBox.
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- Author
- Shima, Akio; Mine, Toshiyuki; Torii, Kazuyoshi
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2007
- Field
- Engineering (Physical Sciences)