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This document discusses the mechanical behavior and damping of miniature GaAs disk optomechanical resonators vibrating in air, utilizing scanning electron microscopy and optical interferometry for analysis. It presents a model for air damping and squeeze-film effects, deriving formulas that accurately predict mechanical modes and damping behavior, which can aid in the design of optomechanical systems. The findings indicate that mechanical damping is primarily influenced by squeeze-film and air damping contr

Author

samirayasmin1117

Language

EN