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About this Engineering article
Silicon nanowire based Pirani sensor for vacuum measurements by Brun, T.; Mercier, D.; Koumela, A.; Marcoux, C.; Duraffourg, L. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Brun, T.; Mercier, D.; Koumela, A.; Marcoux, C.; Duraffourg, L.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2012
- Language
- EN
- Field
- Engineering (Physical Sciences)